HRXRD
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Technical Concept |
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High-Resolution X-ray Diffraction (HRXRD) is an X-Ray Diffraction analysis system with multiple functions such as powder and low-angle diffractions, crystallinity and crystalline grain size exploration, and concentration of compounds and thin films detection. |
Bruker Discover D8 is an X-Ray Diffraction analysis system with multiple functions. In addition to the powder and low-angle diffractions, this system has a triple-crystal analyzer, whose high resolution is proper to explore the crystallinity, crystalline grain size, composition, and concentration of compounds and thin films. Its reciprocal-space-mapping (RSM) function can provide information for the strain of crystal lattice.
In addition, the film thickness, roughness, and electron density on a multi-layers sample can be measured by the X-Ray Reflection (XRR) function. The properties of X-ray penetration and reflection limit the maximum detecting depth to 300 nm and roughness to 5 nm.
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Application |
- High-resolution XRD analysis with triple crystal
- Crystallinity analysis
- Grain size analysis
- XRR Analysis for single/multi-layers film thickness
- Composition analysis of compound film
- Grazing angle diffraction analysis (GID)
- Powder X-Ray Diffraction Analysis (XRD)
- Crystal lattice parameters analysis
- Thin film phase identification
- Reciprocal space mapping (RSM) analysis
- Epitaxy analysis
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Equipment |
 Bruker Discover D8 |
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Application |
HRXRD spectra of an ITO film whose peak widths are used to estimate grain size. |
(a) Thickness and composition analysis for a GaN epixaxial film |
(b) RSM analysis of a GaN epitaxial film |
(c) HRXRD spectra of a SiGe epitaxial film |
(d) XRR analysis for the thickness, density, and roughness of a HfOx film |
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Contact |
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