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Non-destructive Analysis (NDA)

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Materials Analysis (MA)

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CSR Report

HRXRD

Technical Concept

High-Resolution X-ray Diffraction (HRXRD) is an X-Ray Diffraction analysis system with multiple functions such as powder and low-angle diffractions, crystallinity and crystalline grain size exploration, and concentration of compounds and thin films detection.

Bruker Discover D8 is an X-Ray Diffraction analysis system with multiple functions. In addition to the powder and low-angle diffractions, this system has a triple-crystal analyzer, whose high resolution is proper to explore the crystallinity, crystalline grain size, composition, and concentration of compounds and thin films. Its reciprocal-space-mapping (RSM) function can provide information for the strain of crystal lattice.

 

In addition, the film thickness, roughness, and electron density on a multi-layers sample can be measured by the X-Ray Reflection (XRR) function. The properties of X-ray penetration and reflection limit the maximum detecting depth to 300 nm and roughness to 5 nm.

 

 

 

Application

  1. High-resolution XRD analysis with triple crystal
  2. Crystallinity analysis
  3. Grain size analysis
  4. XRR Analysis for single/multi-layers film thickness
  5. Composition analysis of compound film
  6. Grazing angle diffraction analysis (GID)
  7. Powder X-Ray Diffraction Analysis (XRD)
  8. Crystal lattice parameters analysis
  9. Thin film phase identification
  10. Reciprocal space mapping (RSM) analysis
  11. Epitaxy analysis

 

 

 

Equipment


 Bruker Discover D8

 

 

 

 

Application

HRXRD spectra of an ITO film whose peak widths are used to estimate grain size.

 

(a) Thickness and composition analysis for a GaN epixaxial film

(b) RSM analysis of a GaN epitaxial film

 

(c) HRXRD spectra of a SiGe epitaxial film

(d) XRR analysis for the thickness, density, and roughness of a HfOx film

 

 

Contact

Taiwan Lab

Mr. Liu

: +886-3-6116678 ext:3972/3966

: +886-952-303-813

xrd@ma-tek.com

Shanghai Lab

Ms. Tan

: +86-21-5079-3616 ext:7092

: 137-6486-2001

: sims_sh@ma-tek.com