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Non-destructive Analysis (NDA)

Circuit Edit (CKT)

Materials Analysis (MA)

Application Forms

Software

MA-tek FTP

CSR Report

AFM

Technical Concept

Atomic Force Microscope (AFM) uses a sharp tip/probe mounted on a cantilever to scan the sample surface to sense surface electronic and magnetic properties.

 

Atomic force microscope (AFM) uses a sharp tip/probe mounted on a cantilever to scan the sample surface of interest. By bringing the scanning tip to the surface, the cantilever being shined by the laser will bend due to the van der Waals force between the tip apex and the surface. The reflected laser is detected by a photo sensor and its shift position can be converted to the surface morphology.

 

Two main scanning modes, contact and tapping, have been widely adopted for different applications. Based on the current configuration of the system, scanning capacitor microscope (SCM) can be also carried out to provide an additional application for the IC industry. Still, more applications based on AFM technology are continually been developed to sense surface electronic and magnetic properties.

 

 

 

 

Application

  1. <100um surface morphology
  2. Roughness analysis
  3. Local dimension and height measurements
  4. 3D image analysis
  5. Thin film surface structure or defect analysis, maximum sample size: 12” wafer

 

 

 

Equipment

AFM (Bruker ICON)

 

 

 

 

Application Case

(a) Surface roughness analysis

(b) 3D image

 

Section Analysis

 

 

 

Contact

Taiwang Lab

Ms. Liu

: +886-3-6116678 ext:3972/3966

: +886-952-303-813

xrd@ma-tek.com

Shanghai Lab

Mr. Yang

: +86-21-5079-3616 ext:7039

: 137-6486-2001

: xps_sh@ma-tek.com