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Non-destructive Analysis (NDA)

Circuit Edit (CKT)

Materials Analysis (MA)

Application Forms


MA-tek FTP

CSR Report


Technical Concept

The alpha-step uses a diamond-made sharp probe to scan the surface of objects in order to obtain their surface morphology.

The variation of height during scanning is detected and recorded with a conductive sensor. With this, surface morphology and roughness can be obtained.





  1. One-dimensional surface morphology measurement
  2. Thin film thickness determination
  3. Depth analysis
  4. One-dimensional roughness analysis
  5. Maximum sample size for measurement: 200 mm (8” wafer)
  6. Maximum measurement length: 55 mm and maximum Z-range: 1.2 mm









Application Case

Thin film thickness measurement



1D surface roughness analysis





Taiwan Lab

Mr. Liu

: +886-3-6116678 ext:3972/3966

: +886-952-303-813


Shanghai Lab

Ms. Tan

: +86-21-5079-3616 ext:7092

: 137-6486-2001

: sims_sh@ma-tek.com