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Non-destructive Analysis (NDA)

Circuit Edit (CKT)

Materials Analysis (MA)

Application Forms

Software

MA-tek FTP

α-step

Technical Concept

The alpha-step uses a diamond-made sharp probe to scan the surface of objects in order to obtain their surface morphology.

The variation of height during scanning is detected and recorded with a conductive sensor. With this, surface morphology and roughness can be obtained.

 

 

 

Application

  1. One-dimensional surface morphology measurement
  2. Thin film thickness determination
  3. Depth analysis
  4. One-dimensional roughness analysis
  5. Maximum sample size for measurement: 200 mm (8” wafer)
  6. Maximum measurement length: 55 mm and maximum Z-range: 1.2 mm

 

 

 

Equipment

Bruker

 

 

 

Application Case


Thin film thickness measurement


 

 


1D surface roughness analysis

 

 

 

Contact

Taiwan Lab

Mr. Lee

: +886-3-6116678 ext:3972/3966

: +886-952-303-813

op@ma-tek.com

Shanghai Lab

Ms. Tan

: +86-21-5079-3616 ext:7092

: 137-6486-2001

: sims_sh@ma-tek.com