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Non-destructive Analysis (NDA)

Circuit Edit (CKT)

Materials Analysis (MA)

Application Forms

Software

MA-tek FTP

CSR Report

SCM

Technical Concept

Scanning Capacitance Microscope (SCM) can be used to observe two-dimensional dopant image, where N- and P-type areas can be distinguished.

This technology can help to analyze failures due to abnormal dopant distribution as well as reverse engineering. SCM can be used as a complementary tool for other tools, such as SIMS and SRP where only information about 1D distribution is obtained.

 

SCM is one of functions based on AFM and its spatial resolution is about 20 nm. By applying AC bias on metal-coated probes, 2D dopant distribution can be obtained by converting dC/dV signal and therefore, N- and P-type areas and interface can be distinguished.

 

 

  

 

Application

  1. N- and P-type dopant analysis
  2. P-N junction distribution analysis
  3. Failures due to abnormal dopant distribution/leakage analysis
  4. Reverse engineering analysis on 2D dopant distribution

 

 

 

Equipment

Bruker D3100, Multiprobe Hyperion

 

 

 

Application

(a) Cross-section dopant distribution on a SRAM sample

(b) Dopant distribution on a CIS array

 

P/N-trench dopant distribution

 

 

 

Contact

Taiwan Lab

Mr. Lee

: +886-3-6116678 ext:3972/3966

: +886-952-303-813

xrd@ma-tek.com

Shanghai Lab

Ms. Tan

: +86-21-5079-3616 ext:7092

: 137-6486-2001

: sims_sh@ma-tek.com