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Electrical property measurement
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PEM-CCD
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PEM-InGaAs
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OBIRCH
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Thermal EMMI
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C-AFM
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Nano Probing
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EBIC / EBAC
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Electrical property measurement
Technical Concept |
This technology is used to identify the electrical characteristics, such as resistance, capacitance and inductance, of semiconductor devices. Characteristics measured from fail and normal chips could provide important clues for further failure analysis.
Equipment |
![]() Semiconductor parameter analyzer (HP4156C) |
![]() Signal/Function generator (HP3325A) |
![]() High voltage power supply (Keithley 2410) |
![]() Power supply with three pairs of ports (E3631A, 6V/5A, +/-25V/1A) |
![]() Numerical meter (34401A) |
![]() Oscilloscope (DSO-X 3104A) |
![]() DC electronic load (DC electronic load 63600) |
![]() LCR meter (HP4275A) |
![]() High power programmable curve tracer (Tektronix 370A) |
Applications |
- Low leakage measurement (such as LED or Solar cell dark current measurement).
- Characterization for Device, such as CMOS, BJT and BiCMOS IC.
- Spice parameter measurement.
- Circuit open/short test, C-V , inductor and DC/AC measurement of IC.
![]() NMOS Vds-Ids characteristic curve |
![]() PMOS Vds-Ids characteristic curve |
Contact |
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