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Non-destructive Analysis (NDA)

Circuit Edit (CKT)

Materials Analysis (MA)

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Software

MA-tek FTP

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SEM

Technology Concept

Scanning Electron Microscopy (SEM) is powerful to inspect the surface topography and microstructure of solid samples.

Ma-tek provides many high resolution FE-SEM(Field Emission-SEM), such as Hitachi S-4800 and S-8020. It can be used for inspecting a selected layer of an IC sample with skillful delayering and a cross-section of that with CP(ion milling).

 

The magnification of SEM is up to several hundreds of a thousand times. A selected additional component of energy dispersive spectrometer(EDS)of X-ray provides a semi-quantitative identification of sample elements and thus great information of material compositions and impurities.

 

 

 

Equipment

S-4800

S-8020

 

SU-8220

SU-8220

 

 

 

 

Applications

  1. Planar and cross-sectional inspection for the microstructure on various sample surfaces.
  2. Multilayer sample inspection with precise thickness measurement.
  3. Qualitative and semi-quantitative analysis of sample element distribution.
  4. Low voltage SEM can be used for passive voltage contrast (PVC), applied for failure analysis to locate the areas of poor metal contact, leakage, and high resistance.
  5. Many local SEM images can be reconstructed to a global image. Such technology combined with a delayering process can be used for global images of each IC layer. Cross-comparing such and optical microscopy images provides great information for reverse engineering of circuits.
  6. Providing a precise inspection for failures located by EMMI (Emission Microscope) or OBIRCH (Optical Beam Induced Resistance Change).

(a)Plan-view observation of DRAM cell after removing capacitors 

(b) Cross-sectional X-S SEM analysis DRAM cells at word line stitch

(C) Typical X-S SEM observation of IC devices, 2M1P

(d) Plan-view SEM observation of ESD failure

(e) IC reverse engineering

(f) Passive Voltage Contrast(PVC)

 

 

Contact

Taiwan|SoC Lab

SEM team

: +886-3-6116678 ext:3650

: +886-952-301-639

sem_hc@ma-tek.com

Taiwan|JB Lab

SEM team

: +886-3-6116678 ext:1607

: +886-953-303-817

: sem@ma-tek.com

 

Shanghai Lab

Mr. Chang

: +86-21-5079-3616 ext:7038

: - - - - - - -

sem_sh@ma-tek.com

 

 

 

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