TEM
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Technical Concept |
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The progress of analysis on nano-sized electronics materials by Transmission Electron Microscope (TEM) |
In order to improve the resolution, the material of the electron gun for SEMs or TEMs has been replaced, previously using W filament and now using LaB6 or field emission tips. Atomic-resolved images can be achieved with the new electron gun. Besides, due to the increased electron current density, the ability of energy-dispersive X-ray spectroscopy (EDX) for elementary analysis can be dramatically improved.
With continuous development of DEX with a larger detection area or equipping it with four detectors, the detection limit can be cut down to about 0.1 %, which is close to Auger electron spectrometry (AES) and about one order improvement higher than traditional EDX.
TEM Talos |
TEM Talos |
For more application cases, please refer to MA Tech Articles：http://ma-tek.com/en-global/Tech_Article/index/MA
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