TEM
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Technical Concept |
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Transmission Electron Microscopy (TEM) images a sample using an electron beam to observe the micro structure of material and lattice defects. Its resolution is down to 0.1nm (the scale of atom). |
In order to improve the resolution, the material of the electron gun for SEMs or TEMs has been replaced, previously using W filament and now using LaB6 or field emission tips. Atomic-resolved images can be achieved with the new electron gun.
TEM and STEM have better spatial resolution than SEM but often require more complex sample preparation. Besides, due to the increased electron current density, the ability of energy-dispersive X-ray spectroscopy (EDX) for elementary analysis can be dramatically improved.
With the continuous development of DEX with a larger detection area or equipping it with four detectors, the detection limit can be cut down to about 0.1 %, which is close to Auger electron spectrometry (AES) and about one order improvement higher than traditional EDX.
TEM Talos |
TEM Talos |
For more application cases, please refer to MA Tech Articles：http://ma-tek.com/en-global/Tech_Article/index/MA
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