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Technical Concept

The progress of analysis on nano-sized electronics materials by Transmission Electron Microscope (TEM)

In order to improve the resolution, the material of the electron gun for SEMs or TEMs has been replaced, previously using W filament and now using LaB6 or field emission tips. Atomic-resolved images can be achieved with the new electron gun. Besides, due to the increased electron current density, the ability of energy-dispersive X-ray spectroscopy (EDX) for elementary analysis can be dramatically improved.


With continuous development of DEX with a larger detection area or equipping it with four detectors, the detection limit can be cut down to about 0.1 %, which is close to Auger electron spectrometry (AES) and about one order improvement higher than traditional EDX.


TEM Talos

TEM Talos



 For more application cases, please refer to MA Tech Articles:http://ma-tek.com/en-global/Tech_Article/index/MA 




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: +886-3-6116678 ext:3684

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