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Non-destructive Analysis (NDA)

Circuit Edit (CKT)

Materials Analysis (MA)

Application Forms

Software

MA-tek FTP

PEM-CCD

Technical Concept

Emission microscopy(EMMI), also called photon emission microscopy(PEM)can be used to detect high emission photons (called hot spots) to reflects a corresponding failure location.

Emission microscopy (EMMI), also called photon emission microscopy (PEM), has been widely employed to identify failure positions of devices. It uses a cold-charge-coupled device (C-CCD) to detect photons with wavelengths between 400 and 1100 nm. Such photons emitting from a semiconductor device are usually donated by electron-photon recombination and thus EMMI is good to detect related failures, such as latch-up.

 

An area with high emission photons (called hot spots) detected by EMMI reflects a corresponding failure location. Fail isolation is an important step for further failure analysis and therefore EMMI is indispensable in the development of semiconductor devices.

 

 

 

 

Equipment

HAMAMATSU PHEMOS-1000

 

 

 

 

 

Applications

Failures leading to electron-photon recombination

  • P-N Junction leakage
  • Transistor fail caused by open or short circuit
  • Lat-chup
  • Gate oxide leakage
  • Poly-Si filament
  • Substrate damage
  • device burn out

 

 

Artifacts (Normal device emits photons)

  • Floating gates
  • Saturated bipolar transistors or analog MOSFETs
  • Forward biased diode

 

 

Emission undetectable

  •  Emission locations which are blocked

a.Buried junctions

b.Leakage locations under large area of metal lines

 

  • Ohmic shorts
  • Shorted metal interconnects (EMMI could detected such situations in some specific cases.)
  • Surface conductive paths
  • Silicon conduction paths
  • Small leakage current (<0.1 uA)

 

 

 

 

Contact

Taiwan|SoC Lab

EMMI team

: +886-3-6116678 ext:3910/3911 

: +886-952-301632

emmi@ma-tek.com

Taiwan|JB Lab

EMMI team

: +886-3-6116678 ext:1608/1609

: +886- - - - - - -

: emmi_jb@ma-tek.com

 

Shanghai Lab

Mr. Lin

: +86-21-5079-3616 ext:7051

: 159-2162-3719

efa_sh@ma-tek.com