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FIB線路修補

材料分析 (MA)

軟體

MA-tek FTP

永續報告書

Metal Diffusion in Glass

 

 

 

Detailed interface by TEM & Quick-check by SEM/EDS

 

 

Precise depth profiling by SIMS

  • Diffusion depth was found to be around 12um by SIMS, which was reconfirmed by SEM/EDS analysis.
  • The interface between glass and metal can be defined by Co & Ni concentration.
  • SIMS detection sensitivities is better than other analysis instruments, the diffusion depth could be observed more deeply.