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FIB線路修補

材料分析 (MA)

軟體

MA-tek FTP

永續報告書

Wafer Level, Chip Level

LED structure analysis

(a)X-ray image;(b)SEM image;(c)TEM image;(d)TEM image ;(e)TEM image;(f)HAADF image;(g)Optical Profile

 

(a)Display search : IEK/ITRI

(b)SIMS doping profile/depth profile