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OM(Optical Microscope)
Technical Concept
The imaging principle of Optical Microscope is to illuminate the surface of specimen by visible light source and induce local scattering and reflection to get various contrast. Due to the wavelength of visible light is around 4000-7000Å,the resolution (or distinguishability, the shortest distance which can be recognized between two points) is the worst.。In normal operation, the distinguishability of eyes is only 0.2 mm, the highest magnification is 1000X when the best resolution of OM is only 0.2um. In limited magnification, the field of view is the largest. This explain the fact that OM can provide a lot of preliminary data or information of structure.
Equipment Capacity
| 50-1000X |
100-500X / 40-200X / 5-75X |
50-1000X |
Application
Although the magnification and resolution of OM is difficult to satisfy the requirement of surface inspection of materials, it still can be applied in below applications :
(1)Cross-sectional structure inspection of device
(2)Structure analysis and inspection by plane-view delayer
(3)Precipitate Free Zone inspection of educt
(4)Stain inspection of dislocation line and overetch
(5)Study of Oxidation Enhanced Stacking Faults (OSF)
Contact Window
Chemical Dept.：
Tel：+886-3-6116678 ext：2601~3
Mobile：+886-922-301638
Technical Consultant：
PS Kuo
Tel：+886-3-6116678 ext：2300
Mobile：+886-952-303815
Email：HC_PFA@ma-tek.com
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