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PFA (Physical Failure Analysis)

Decapsulation
ĄDWet etching by chemical solutions
ĄDAuto decapsulation
ĄDLaser Decap

Delayering (Delayering of Cu damascene process)
ĄDWet etching by chemical solutions
ĄDDry etching by RIE (Reactive Ion Etcher)

Sample preparation
ĄDPlan-view
ĄDCross-sectioning
ĄDParallel lapping
ĄDLaser Cut

SEM (Scanning Electron Microscope)

TEM (Transmission Electron Microscope)

FIB (Focused Ion Beam)

SIMS (Secondary Ion Mass Spectrometry)
ĄDTools (model number)
ĄDIndustrial applications

Optical Profiler
ĄDTools (model number)
ĄDIndustrial applications

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